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提出和发展了一种基于微尺度光热膨胀效应的微型光热驱动机构.建立了膨胀臂的微尺度光热传导与膨胀的物理模型,利用有限元分析和数学物理方法,推导出膨胀臂的一维温度分布表达式及光热膨胀量和偏转量的计算公式.利用准分子激光微加工系统设计制作了一个长度为1200μm的微型光热驱动样机,根据激光和样机的相关参数,计算得到光热膨胀量与激光功率之间的理论关系曲线.实验结果表明,微型光热驱动机构的光热偏转量(对应于膨胀量)与照射到膨胀臂上的激光功率近似成线性关系,实验曲线与理论模型及计算结果符合良好.在理论和实验研究基础上,作为光热微驱动的应用实例,设计并加工制作了一个双向微开关型光热驱动机构,并通过实验实现了双向微开关功能.
A micro-photothermal drive mechanism based on micro-scale photothermal expansion is proposed and developed. A physical model of micro-scale photothermal conduction and expansion of the expansion arm is established. By means of finite element analysis and mathematical physics, one- Temperature distribution expression and calculation formula of thermal expansion and deflection.Using an excimer laser micro-machining system to design a miniature photothermal-driven prototype with a length of 1200μm, according to the relevant parameters of the laser and the prototype, calculate the thermal expansion and Laser power.Experimental results show that the amount of light-heat deflection (corresponding to the amount of expansion) of the micro-photothermal drive mechanism is approximately linear with the laser power applied to the expansion arm. The experimental curves, theoretical models and calculations The results are in good agreement.On the basis of theoretical and experimental research, a bi-directional micro-switch type light-heat drive mechanism is designed and fabricated as an application example of photothermal micro-drive, and the bi-directional micro-switch function is realized through experiments.