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最近,由于大量潜在的应用需要,如遥感、红外医学热象和气体探测,室温工作的红外传感器已受到相当重视,PbTiO_3因其热释电系数大且居里温度高,所以它具有优良的热释电特性。本文,我们试验制作了一种可获得红外成象的PbTiO_3薄膜线型列阵探测器,并研究了列阵探测器的基本特性。图1给出了PbTiO_3薄膜集成探测器线列的简单结构。衬底为厚约20～50μm的云母片、单晶硅和硅膜。在硅膜衬底中,灵敏元背面的部分硅被用择优腐蚀方法去除,留下的厚约
Recently, due to a large number of potential applications such as remote sensing, infrared medical thermography and gas detection, infrared sensors operating at room temperature have received considerable attention and PbTiO_3 has excellent heat due to its large pyroelectric coefficient and high Curie temperature Release characteristics. In this paper, we experimentally fabricated a PbTiO_3 thin film linear array detector capable of obtaining infrared images and investigated the basic characteristics of the array detector. Figure 1 shows the simple structure of the PbTiO_3 thin film integrated detector line array. The substrate is a mica plate having a thickness of about 20 to 50 μm, monocrystalline silicon and a silicon film. In a silicon film substrate, some of the silicon on the back side of the sensing element is removed by a well-etched method, leaving a thickness of about