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在电子束曝光机中尽管激光工作台测量精度很高,分辨率可达0.04微米但是由于驱动电机停机后,工件台仍有少量的过冲或反弹,X-Y两根导轨的正交度也不可能达到绝对正交的理想水平,因此一个方向运动时。另一个方向也难免有几个当量值的随动。再加上环境振动等原因,在扫描曝光过程中都会造成工件台偏离理想位置的可能。因此必须对工件台的动态位置偏移加以校正,才能满足拼图、套刻等加工要求,作出满意的版图。本文介绍用电子柬校正工件台位置偏移的原理。并对补偿电压测试结果及加工版图测试结果加以分析讨论。
Although the accuracy of the laser stage measurement accuracy of the electron beam exposure machine, the resolution of up to 0.04 microns However, due to drive motor shutdown, the workpiece stage there is still a small amount of overshoot or rebound, XY orthogonality of the two rails can not To reach the ideal level of absolute orthogonal, so when moving in one direction. The other direction is also inevitably have a few equivalents of follow-up. Coupled with environmental vibrations and other reasons, will cause the workpiece table deviation from the ideal position in the scanning exposure process. Therefore, it is necessary to correct the dynamic position offset of the workpiece table so as to satisfy the processing requirements of the puzzle, the set of engravings and the like and make a satisfactory layout. This article describes the use of electronic cards to correct the principle of workpiece stage offset. The compensation voltage test results and processing layout test results are analyzed and discussed.