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应用有限差分方法对金属-半导体-金属光探测器进行二维分析,全部数值模拟工作都是基于半导体物理的基本微分方程完成的·结合模拟结果对金属-半导体-金属光探测器的瞬态响应进行了分析,以特性分析结果为基础针对探测器的响应速度和响应率等性能指标进行了二维结构上的优化设计·
The two-dimensional analysis of the metal-semiconductor-metal photodetector is carried out by using the finite difference method. All the numerical simulations are based on the basic differential equations of the semiconductor physics. · The transient response of the metal-semiconductor-metal photodetector combined with the simulation results Based on the analysis results, two-dimensional structural optimization design was carried out based on the performance indicators such as the response speed and response rate of the detector.