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采用双靶共溅射的方法在FJL600EI型超高真空多功能磁控溅射仪上制备不同复合量的ZnO-TiO2复合薄膜,对不同工艺参数制备的ZnO-TiO2复合薄膜进行形貌结构分析、光催化性测定和亲水性检测。结果表明,当Ti靶材的溅射功率为150 W时,得到了颗粒大小均匀的ZnO-TiO2复合薄膜,且复合薄膜对甲基橙的降解率最高,亲水性最优。ZnO-TiO2薄膜的光催化性明显高于单一ZnO薄膜。
Double-target co-sputtering method was used to prepare different composite ZnO-TiO2 films on FJL600EI ultra-high vacuum multi-functional magnetron sputtering apparatus. The morphology and structure of ZnO-TiO2 composite films prepared by different process parameters were analyzed. Photocatalytic determination and hydrophilicity detection. The results show that the ZnO-TiO2 composite film with uniform particle size is obtained when the sputter power of Ti target is 150 W, and the composite film has the highest degradation rate of methyl orange and the best hydrophilicity. The photocatalytic activity of ZnO-TiO2 thin films is obviously higher than that of single ZnO thin films.