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采用直流磁控反应溅射方法,通过调节氧分压在玻璃基底上制备了不同载流子浓度的掺Mo的ZnO(ZMO)透明导电薄膜.应用太赫兹电磁波时域光谱技术研究了ZMO导电膜的太赫兹电磁波透射性质及介电响应,得到了与频率相关的电导率、能量吸收和薄膜折射率,实验结果与经典Drude模型相符很好.ZMO导电膜的太赫兹电磁波脉冲透射性质表明,通过调节ZMO薄膜的载流子浓度,该导电膜可作为应用于衬底和光学器件等太赫兹电磁波频率范围的宽带抗反射涂层.
The transparent conductive films doped with Mo and ZnO (ZMO) with different carrier concentration were prepared by direct current magnetron reactive sputtering method on glass substrates by adjusting the partial pressure of oxygen.The effects of ZMO conductive film The results show that the experimental results are in good agreement with the classical Drude model.The terahertz electromagnetic pulse transmission properties of the ZMO conductive films indicate that the transmission through the Adjusts the carrier concentration of the ZMO film as a wideband anti-reflection coating for the terahertz frequency range of substrates and optics.