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采用射频等离子体增强化学气相沉积(RF-PECVD),以Fe作为催化剂,在Si基片上生长了碳纳米管(CNT),采用扫描电子显微镜(SEM)、高分辨透射电子显微镜(HR TEM)以及显微Raman光谱等对制备的CNT的形貌及结构进行了表征。结果表明:700℃和800℃温度下生长的CNT均取向无序、弯曲缠结,由整齐排列的圆筒状石墨片构成,层间距约为0.34 nm,属于结晶性多壁CNT;在700℃基片温度下生长的CNT均匀细长,管径约为15~20 nm,长度约2μm;800℃基片温度下生长的CNT纯度较高。
Carbon nanotubes (CNTs) were grown on Si substrate by RF-PECVD using Fe as catalyst. Scanning electron microscopy (SEM), high-resolution transmission electron microscopy (HR TEM) The morphology and structure of the prepared CNTs were characterized by Raman spectroscopy. The results show that the CNTs grown at 700 ℃ and 800 ℃ are randomly oriented, bent and entangled, and consist of cylindrical graphite sheets arranged at regular intervals of about 0.34 nm, which belongs to the crystalline multi-walled CNTs. At 700 ℃ The CNTs grown at the substrate temperature were uniformly slender with the diameter of about 15-20 nm and the length of about 2 μm. The CNTs grown at the substrate temperature of 800 ° C had high purity.