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真空检测仪表在真空系统中占有重要位置,特别是对真空的压力和充气流量的自动控制要求也越来越高.目前还在研制中的压力流量自动控制仪是一台多功能仪器,它是真空镀模设备必备的仪器.介绍了该仪器的研制情况,给出了压力流量自动控制仪的技术参数,并对其工作原理,组成部分和工作过程做了详细地说明,压力流量自动控制仪,在控制压力的过程能测定流量,在控制流量的过程能检测压力.在要求较高的溅射或制备超导等材料中必须了解流量的大小.以达到预期的效果.压力流量自动控制可以解决此问题.
Vacuum instrumentation in the vacuum system occupies an important position, especially for vacuum pressure and inflatable flow of automatic control requirements are also higher and higher.At present, the pressure flow is still under development automatic control instrument is a multi-function instrument, which is Vacuum plating equipment necessary equipment. The development of the instrument is introduced, and the technical parameters of the automatic control device for pressure and flow rate are given. The working principle, components and working process of the instrument are described in detail. The automatic control of pressure flow Instrument, in the control of the pressure of the process can measure the flow in the process of controlling the flow rate can be detected in the sputtering or preparation of superconducting materials such as the need to understand the size of the flow rate in order to achieve the desired effect. Automatic control of pressure flow This problem can be solved.