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分析了钛表面双层辉光等离子渗钯放电状态中的空心阴极放电,分析认为工件极内部是等电位空心阴极放电,源极与工件极是不等电位空心阴极放电。通过对放电状态下电子的作用分析,论证了源极与工件极距离选择20mm,工件极尺寸选择50mm,气体压力选择20Pa是比较合理的电极结构尺寸和气体压力参数。
The hollow cathode discharge in the discharge state of double glow plasma on titanium surface was analyzed. It is considered that the discharge of hollow cathode is equipotential at the inside of the workpiece and the hollow discharge of the cathode at the same potential. Through the analysis of the effect of the electrons in the discharged state, it is proved that the distance between source and workpiece is 20mm, the size of workpiece is 50mm, and the pressure of gas is 20Pa, which is a reasonable electrode structure size and gas pressure parameter.