【摘 要】
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With the use of a chemical-mechanical polishing(CMP) simulator verified by testing data from a foundry, the effect of dummy fill characteristics,such as fill si
【机 构】
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Institute of Microelectronics,Chinese Academy of Sciences,
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With the use of a chemical-mechanical polishing(CMP) simulator verified by testing data from a foundry, the effect of dummy fill characteristics,such as fill size,fill density and fill shape,on CMP planarity is analyzed. The results indicate that dummy density has a significant impact on oxide erosion,and copper dishing is in proportion to dummy size.We also demonstrate that cross shape dummy fill can have the best dishing performance at the same density.
With the use of a chemical-mechanical polishing (CMP) simulator verified by testing data from a foundry, the effect of dummy fill characteristics, such as fill size, fill density and fill shape, on CMP planarity is analyzed. density has a significant impact on oxide erosion, and copper dishing is in proportion to dummy size. We also demonstrate that cross shape dummy fill can have the best dishing performance at the same density.
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