在激光剥离机制的基础上，分析了激光直接刻蚀过程中，蒸气压及热传导对图形刻蚀质量的影响，并得出了刻蚀不同厚度Ａｌ膜的激光能量密度、脉冲频率和刻蚀脉冲数的最佳组合．对Ｔａｌｂｏｔ成像法中对比度对图形刻蚀质量的影响也进行了分析 Based on the laser ablation mechanism, the influence of vapor pressure and heat conduction on the quality of the pattern etching during the laser direct etching process was analyzed. The laser energy density, pulse frequency and etching pulse The best combination of numbers. The effect of contrast on the quality of the patterned etch in the Talbot imaging method is also analyzed