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如何测量封装材料的气体渗透率是OLED封装技术研究中的一个重要问题。本文提出了静态积累式进样质谱法来测量OLED封装材料的气体渗透率,设计了静态积累式进样质谱法测量系统,对柔性OLED封装材料PET薄膜的气体渗透率进行了测量,并分析了测量系统的灵敏度,结果表明,静态积累式进样质谱法测量OLED封装材料气体渗透率是可行的,且渗透时间为100天时,静态积累式进样质谱法对水蒸气的测量灵敏度可达4×10~(-5)g/m~2day。如果渗透时间进一步延长,静态积累式进样质谱法的测量灵敏度有望达到理想的1 10~(-6)g/m~2·day量级。对比动态抽除式进样质谱法,静态积累式进样质谱法的灵敏度提高了1-2个数量级,有效提升了质谱法的灵敏度。
How to measure the gas permeability of packaging materials is an important issue in the research of OLED packaging technology. In this paper, we propose a static and integrated sample-injection mass spectrometry to measure the gas permeability of OLED packaging material. We designed a static and integrated sample-injection mass spectrometry measurement system to measure the gas permeability of flexible OLED packaging material PET film. The sensitivity of the system was measured. The results show that it is feasible to measure the gas permeability of the OLED packaging material by the static integrated sample-injection mass spectrometry. When the permeation time is 100 days, the static-sensitive mass spectrometry method can measure the water vapor to 4 × 10 ~ (-5) g / m ~ 2day. If the permeation time is further prolonged, the measurement sensitivity of the static APCT is expected to reach the ideal level of 1 10 -6 g / m 2 · day. Compared with dynamic sampling, the sensitivity of static mass spectrometry was improved by 1-2 orders of magnitude, which effectively enhanced the sensitivity of mass spectrometry.