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随着MEMS技术的发展,对微纳尺寸器件的需求日益凸显,微能源的研究变得尤为重要,而微型超级电容器则是其中一种基于电化学电容实现储能的微型能量存储器件.设计了一种基于氧化钌功能薄膜的三维微柱阵列电极,并进行了相关的扫描电镜(SEM)、循环伏安(CV)和交流阻抗谱(EIS)测试.测试表明在2 mm×2 mm的硅片上,直径为50μm、高为100μm的三维微柱阵列电极的比电容为2.43 F/cm2,具有良好的电化学性能.与同容量的二维平面电极相比,基于三维结构的微型超级电容器具有明显的小尺寸优势.
With the development of MEMS technology, the demand for micro-nano devices has become more and more prominent, the research of micro-energy becomes more and more important, and the micro-supercapacitor is one of the micro-energy storage devices based on electrochemical capacitors for energy storage. A three-dimensional micro-column array electrode based on a ruthenium oxide functional film was prepared and its related SEM, CV and EIS tests were carried out.The results showed that in the 2 mm × 2 mm silicon The specific capacitance of the three-dimensional micro-column array electrode with the diameter of 50μm and the height of 100μm is 2.43 F / cm2, which has good electrochemical performance.Compared with the two-dimensional planar electrode of the same capacity, the three-dimensional structure of the micro-capacitor Has obvious advantages of small size.