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介绍了利用激光直接光刻技术制作８相位台阶菲涅尔衍射微透镜列阵的工艺方法，并对元件的衍射效率及光刻过程中的制作误差进行了分析，透镜列阵在小形Ｓｈａｃｋ－Ｈａｒｔｍａｎｎ波前传感器中得到了应用。
The fabrication method of 8-phase step Fresnel diffraction microlens array by laser direct lithography is introduced. The diffraction efficiency of the element and fabrication error in the lithography process are analyzed. In the small Shack-Hartmann Wavefront sensor has been applied.