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中国科技大学国家同步辐射实验室“光谱辐射标准与计量实验站”上的反射率计主要用于测量各种光学元器件在X射线、真空紫外波段的反射率。为保证测试结果的精确性和可靠性,在大量实验数据的基础上,结合必要的理论推导,对反射率计测试误差来源及影响程度进行了分析,确定影响反射率计测试精度的主要因素包括光源、探测器、样品安装等。总结了光源波动、探测器损坏的几种典型形式,定性、定量地分析了这些因素和样品安装、光斑尺寸对测试精度的影响,针对性地提出了应对办法,把测试误差控制在2%以内,从而有效地保证了测试精度。
China University of Technology National Synchrotron Radiation Laboratory “spectral radiation standards and measurement experimental station ” on the reflectometer is mainly used for measuring various optical components in the X-ray, vacuum ultraviolet spectral reflectance. In order to ensure the accuracy and reliability of test results, based on a large amount of experimental data, combined with the necessary theoretical derivation, the sources and influence degree of the test errors of the reflectometer are analyzed to determine the main factors affecting the test accuracy of the reflectometer. Light source, detector, sample installation and more. Several typical forms of light source fluctuation and detector damage are summarized, and the influence of these factors and sample installation and spot size on the test accuracy are qualitatively and quantitatively analyzed. The countermeasures are put forward in a targeted way, and the test error is controlled within 2% , So as to effectively ensure the test accuracy.