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石英晶振的谐振频率在出厂前都需要进行微调,使之达到需要的标称值。本文提出激光调频的新技术,利用适当激光能量使电极膜层汽化减薄,从而使晶振的频率精确升高到预期值,重点研究了激光器的工作电流和Q脉冲宽度等参数对晶振频率微调的影响。实验结果表明:当工作电流太小(<10A)或Q脉冲宽度太大(>10μs)时,激光脉冲的峰值能量密度太小不足以有效实现频率微调;当工作电流和Q脉冲宽度比较合适(电流约为11A,Q脉冲宽度为4～10μs)时,石英晶振的谐振频率可以被线性地调节,此时对晶振其它电性能参数影响很小;当工作电流过大(>11A)或Q脉冲宽度过小(<4μs)时,激光脉冲能量密度过大,很容易对电极膜造成损伤而导致不能起振。
The resonant frequency of the quartz crystal needs to be fine-tuned at the factory to achieve the desired nominal value. In this paper, a new technique of laser frequency modulation is proposed. The appropriate laser energy is used to vaporize and thin the electrode film, so that the frequency of the crystal oscillator is precisely raised to the expected value. Focusing on the fine tuning of the crystal oscillator frequency by parameters such as laser operating current and Q pulse width influences. The experimental results show that when the operating current is too small (<10A) or the Q pulse width is too large (> 10μs), the peak energy density of the laser pulse is too small to effectively adjust the frequency. When the operating current and the Q pulse width are suitable Current is about 11A, Q pulse width is 4 ~ 10μs), the resonant frequency of the quartz crystal can be linearly adjusted, at this time the other electrical parameters of the crystal have little effect; when the operating current is too large (> 11A) or Q pulse When the width is too small (<4μs), the energy density of the laser pulse is too large, and the electrode film is easily damaged and the vibration can not be started.