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针对微进给伺服机构的基本特性,采用PID校正控制和前馈补偿控制。在此基础上,为进一步减小微进给伺服机构的跟踪误差.提出在线误差前债补偿控制方法。理论分析证明,该方法可以提高微进给伺服机构的控制精度而不影响系统的稳定性。实验结果表明,采用这种误差补偿方法,系统控制精度可以达到±3μm。
For the basic characteristics of micro-feed servo, using PID correction control and feedforward compensation control. On this basis, in order to further reduce the tracking error of the micro-feed servo. Put forward online error compensation method for debt before. Theoretical analysis proves that this method can improve the control accuracy of the micro-feed servo without affecting the stability of the system. Experimental results show that using this error compensation method, the system control accuracy can reach ± 3μm.