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电荷耦合器件 CCD,在影像传感、信号处理和数字存贮等领域中已得到广泛应用,而 CCD 应用到衍射计量技术有其独到的优越性,将提高衍射计量的精度,具有一定的先进性和实用性。激光衍射测径仪为非接触、快速、高精度线径测量系统,可进行静态定点检测和动态实时测量,并可对连续生产的系统自动监测,测量范围20—510μm,精度在小于200μm 时为±0.5μm。200—510μm 时为±0.5%,其中 CCD 信号的接收全部采用 Apple-Ⅱ计算机软件编程。本文介绍的是以 MCS-51系列单片微机取代系统机,为微小尺寸计量提供了一种新的检测手段和方法。
Charge-coupled device CCD has been widely used in the field of image sensing, signal processing and digital storage. The application of CCD to diffraction measurement has its unique superiority, which will improve the precision of diffraction measurement and has some advanced features And practicality. Laser diffraction diameter measuring instrument is a non-contact, fast, high-precision diameter measurement system that can carry out static point detection and dynamic real-time measurement. It can automatically monitor the continuous production system with a measuring range of 20-510μm and an accuracy of less than 200μm ± 0.5 μm. ± 0.5% at 200-510μm, of which CCD signal reception was all programmed by Apple-Ⅱ computer software. This article describes the MCS-51 series of single-chip microcomputer to replace the system machine, for the measurement of a small size provides a new detection methods and methods.