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为了简化非本征型法布里-珀罗干涉(EFPI)传感器的制作工艺,充分发挥其压力测量高精确度的优势,便于大规模工业化应用。介绍了一种简单结构的熔接式全石英光纤 EFPI 高静压传感器,对传感器的压力效应进行了理论分析,给出传感探头设计结构和制作过程。和一般的传统 EFPI 传感器相比,此传感器具有大腔长,结构简单,制作工艺简易,应用灵活方便等优点,可以用于较高静态压力的测量。建立了传感解调系统,对压力进行了测试,测量精确度高,稳定性好。同时进行了温度敏感度测量实验,温度交叉敏感度低。该传感器在 0-20MPa 压力测量范围内,压力腔长灵敏度可以达到 21nm/MPa,连续 10 小时动态测量条件下,测量偏差为 0.2%FS。
In order to simplify the manufacturing process of extrinsic Fabry-Perot interference (EFPI) sensors and give full play to the advantages of high accuracy of pressure measurement, it is convenient for large-scale industrial applications. A simple structure welded full quartz fiber EFPI high static pressure sensor is introduced, the pressure effect of the sensor is theoretically analyzed, and the design structure and manufacturing process of the sensing probe are given. Compared with the traditional EFPI sensor, this sensor has the advantages of large cavity length, simple structure, simple manufacturing process and flexible application. It can be used for the measurement of higher static pressure. The sensor demodulation system was established to test the pressure, the measurement accuracy is high and the stability is good. At the same time, a temperature sensitivity experiment was carried out with low temperature cross sensitivity. The sensor in the 0-20MPa pressure measurement range, the pressure chamber length sensitivity can reach 21nm / MPa, continuous 10 hours of dynamic measurement conditions, the measurement error of 0.2% FS.