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采用由射频磁控溅射方法在玻璃衬底制备的镁掺杂氧化锌(ZnO:Mg)薄膜材料,通过压电光声光谱法测量其在可见光波段的光吸收特性,并与透射光谱法测得的吸收率数据进行了比较,得到了一致性较好的结果。同时,从理论上推导分析了玻璃衬底上ZnO:Mg压电光声信号与光吸收率的关系及变化规律,并由实验证实:光声信号为玻璃基底与ZnO:Mg薄膜的共同贡献,光声信号的幅值与吸收率呈反相关,这一结论与理论分析得到的结果一致。
Magneto-doped zinc oxide (ZnO: Mg) thin film material prepared by RF magnetron sputtering on glass substrate was measured by piezoelectric photoacoustic spectroscopy in the visible light wavelength range, and measured by transmission spectroscopy The data of absorption rate were compared and the result of good consistency was obtained. At the same time, the relationship between the ZnO: Mg piezoelectric photoacoustic signal and the light absorption rate and the change rule are theoretically deduced and analyzed. The experiment shows that the photoacoustic signal is the common contribution of the glass substrate and the ZnO: Mg film, The photoacoustic signal amplitude and absorption rate was inversely correlated, this conclusion is consistent with the theoretical analysis.