声表面波(SAW)器件,已经被广泛用于通讯、数据处理和传感器中,声表面波在器件基片边缘的反射,将会反过来干扰主信号,并降低器件的性能。因此,在SAW器件基片的边缘,经常涂敷一些■或硅胶之类的吸声物质。现在,SAW器件都用图形光刻工艺来制作,然而,吸声材料仍沿用丝网印刷或手工 Surface acoustic wave (SAW) devices, which have been widely used in telecommunications, data processing and sensors, and the reflection of surface acoustic waves on the edge of the device substrate, will in turn interfere with the main signal and reduce the performance of the device. Therefore, at the edge of the SAW device substrate, some of the sound-absorbing material such as silica or the like is often applied. SAW devices are now manufactured using a lithography process, however, the sound-absorbing material is still screen printed or hand-made