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等离子体法制备超微材料是比较理想的方法之一，采用等离子体法制备类金刚石膜，近年来有了很大的进展，通过比较可知：等离子体法可以在低温下进行化学合成反应，实现了低温化学气相反应过程；反应转率高能充分利用反应物源；不需要其它助剂可以合成高纯度高密度、薄膜粒度可控制在纳米级到亚微米级的材料；可以进行亚稳态物质和新材料的合成。
Plasma is one of the ideal methods for preparing ultrafine materials. Plasma-based diamond-like carbon (DLC) films have been developed in recent years. The comparison shows that the plasma method can be used in chemical reactions at low temperature Low temperature chemical vapor phase reaction; high reaction rate to take full advantage of the reactant source; without the need for other additives can be synthesized high purity and high density, the film size can be controlled in the nanoscale to submicron-level materials; can metastable matter and Synthesis of new materials.