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5. HIGH PERFORMANCE ELECTRIC FIELD MICRO SENSOR WITH COMBINED DIFFERENTIAL STRUCTURE

HIGH PERFORMANCE ELECTRIC FIELD MICRO SENSOR WITH COMBINED DIFFERENTIAL STRUCTURE

来源 :电子科学学刊：英文版 | 被引量 : 0次 | 上传用户：maitianquan159

【摘 要】

：

This paper presents a high performance electric field micro sensor with combined differential structure.The sensor consists of two backward laid micro-machined

【作 者】

：

Wen Xiaolong Peng Chunrong Fan 

【机 构】

：

StateKeyLaboratoryofTransducerTechnology,UniversityofChineseAcademyofSciences,NationalKeyLaboratoryo

【出 处】

：

电子科学学刊：英文版

【发表日期】

：

2014年2期

【基金项目】

：

Supported by the National High Technology Hesearch and Developlnent Program of China （863 Program, 2011AA040405）, and the National Natural Science Foundation of China （Nos. 61101049, 61201078, 6130203

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This paper presents a high performance electric field micro sensor with combined differential structure.The sensor consists of two backward laid micro-machined chips,each packaged by polymer and metal.The novel combined differential structure effectively

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