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利用AIP-01多弧离子镀膜机,通过改变铬靶电流,在高速钢基体上沉积出不同Cr含量的(Ti,Cr)N复合膜涂层,用扫描电子显微镜、微纳米力学测试仪和X射线对薄膜的表面颗粒、硬度及内应力进行了分析。结果表明薄膜中添加Cr能减小表面颗粒尺寸,提高硬度,当Cr的含量达到31%(wt%)时,薄膜硬度达到最高值,此时薄膜的内应力也最大。
By means of AIP-01 multi-arc ion plating machine, the (Ti, Cr) N composite coatings with different Cr content were deposited on high speed steel substrate by changing the current of the chromium target. The scanning electron microscopy, micro- Radiation on the film surface particle, hardness and internal stress were analyzed. The results show that adding Cr can reduce the surface particle size and increase the hardness. When the content of Cr reaches 31% (wt%), the hardness of the film reaches the maximum, and the internal stress of the film is also the largest.