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设计了一种基于聚合物材料的延迟线阵列与热光开关的集成器件.利用Rsoft软件设计并模拟了多模干涉热光开关的性能,可实现输出光场强度随电极加热温度变化.设计了螺旋结构的延迟线阵列,利用BPM软件对螺旋结构波导进行数值模拟,综合考虑器件尺寸和损耗参量设计出螺旋结构的弯曲半径.将延迟线阵列结构与热光开关进行集成,能够实现热光控制的聚合物延迟线阵列,该器件可实现的最大延迟时间为399.4ps,延迟间隔为9.2ps.以SiO2为下包层,SU-8紫外固化光刻胶为波导芯层,聚甲基丙烯酸甲脂为上包层,采用旋涂、光刻、湿法腐蚀等工艺制备了1×4延迟线阵列与MMI热光开关的集成器件,测试得到了延迟线阵列的近红外输出光斑,插入损耗为15~19dB.
An integrated device of delay line array and thermo-optic switch based on polymer material was designed.With Rsoft software, the performance of multi-mode interference thermo-optic switch was designed and simulated, and the output light field intensity could be changed with the heating temperature of the electrode. Spiral structure of the delay line array, the use of BPM software for numerical simulation of spiral waveguide structure, considering the device size and loss parameters to design the spiral structure of the bending radius of the delay line array structure and the thermo-optic switch integrated thermal control can be achieved Of the polymer delay line array, the device can achieve the maximum delay time of 399.4ps, the delay interval of 9.2ps. With SiO2 as the cladding, SU-8 UV curable photoresist as the waveguide core, polymethyl methacrylate And the grease is the upper cladding layer. An integrated device of a 1 × 4 delay line array and an MMI thermo-optical switch was prepared by the techniques of spin coating, photolithography and wet etching. The near-infrared output light spot of the delay line array was tested and the insertion loss was 15 ~ 19dB.