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本文探究了中温处理过程温度对膜表面形貌、厚度以及Ba_(1-x)Y_x F_(2+x)(BaYF)固溶体相转变的影响.研究表明,在中温处理过程中膜的厚度会随着温度的升高而降低,最后得到的中温处理膜表面无褶皱和裂纹;具体在这一过程发生的反应为当中温处理温度为520℃时,部分BYF固溶体转变为BaF_2,其中的Y元素以YF_3的形式与水汽反应生成Y_2O_3;当温度升高到680℃时,生成的Y_2O_3与CuO反应生成Y_2Cu_2 O_5;当中温处理温度为700℃、720℃,从XRD图中观察到部分BaF_2开始与水反应生成BaO;当温度升高到740℃时,BaF_2峰完全消失,说明膜中的F元素已完全以HF气体的形式释放出去,而生成的BaO则与Y_2Cu_2O_5反应生成YBCO.
The effect of temperature during medium temperature treatment on the surface morphology and thickness of Ba 1-x Y x F 2 + x BaYF solid solution was investigated in this paper. The results show that the thickness of the film increases with the increase of temperature With the temperature increasing and decreasing, the surface of the finally obtained medium-temperature treatment film has no wrinkles and cracks; in particular, a reaction occurs in this process when part of the BYF solid solution is transformed into BaF_2 when the temperature is 520 ° C., YF_3 reacts with water vapor to form Y_2O_3. When the temperature rises to 680 ℃, Y_2O_3 is reacted with CuO to form Y_2Cu_2 O_5. When the temperature is 700 ℃ and 720 ℃, some BaF_2 starts to react with water The BaO_2 peak completely disappeared when the temperature was raised to 740 ℃, indicating that the F element in the film was completely released as HF gas and the BaO reacted with Y_2Cu_2O_5 to form YBCO.