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在氮气和氩气的混合气氛下通过共溅射石墨靶和钛靶在M2高速钢基体上制备TiCN薄膜,利用扫描电子显微镜和X射线衍射仪分析TiCN薄膜的组织与结构,采用纳米压痕仪检测TiCN薄膜的硬度,同时采用压痕法和划痕法评价薄膜与基体的结合状况,并对TiCN薄膜丝锥进行切削试验,考察TiCN薄膜的耐用性。结果表明:TiCN薄膜中的C原子以固溶于TiN晶格形式存在,TiCN薄膜在(111)晶面的取向较TiN薄膜明显减弱,TiCN薄膜的断口为长块状结构,其横向尺寸较TiN薄膜小,TiCN薄膜表面呈凹凸状。TiCN薄膜与基体的结合力为40N左右,C原子在TiCN薄膜中具有固溶强化和细晶强化作用,TiCN薄膜的硬度由TiN薄膜的20.3提高到33.4GPa。TiCN薄膜具有良好的减摩性能,攻丝40Cr材质时TiCN薄膜丝锥的使用寿命较TiN薄膜丝锥和无涂层丝锥明显提高。
The TiCN thin films were prepared on the M2 high-speed steel substrate by co-sputtering graphite target and titanium target in a mixed atmosphere of nitrogen and argon. The structure and microstructure of the TiCN thin films were analyzed by scanning electron microscopy and X-ray diffractometry. The hardness of TiCN film was measured. Meanwhile, indentation method and scratching method were used to evaluate the bonding between the film and the substrate. The TiCN film tap was cut to test the durability of the TiCN film. The results show that the C atoms in the TiCN film exist as solid solution in the TiN crystal lattice. The orientation of the TiCN film on the (111) crystal plane is obviously weaker than that on the TiN film. The fracture of the TiCN film is long block structure, Thin film, TiCN film surface was uneven. The bonding strength between TiCN film and substrate is about 40N, the C atom has solid solution strengthening and fine grain strengthening in TiCN film, and the hardness of TiCN film increases from 20.3 to 33.4GPa in TiN film. TiCN film has a good anti-friction performance, tapping 40Cr material TiCN thin film taps life than TiN thin film taps and uncoated taps significantly improved.