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介绍了一种小孔扫描测量大数值孔径光学系统小光斑的方法。利用近场光学显微镜的光纤探针采样技术和压电陶瓷扫描技术 ,可对光学系统小光斑的光强分布进行高空间分辨的测量。由于光纤探针采样点的大小为几十纳米或更小 ,压电陶瓷扫描间距为几纳米或更小 ,因此该方法特别适合大数值孔径光学系统小光斑的测量。实验证明 ,采用该方法 ,测量的空间分辨率可达 5 0～ 10 0nm左右。
A method for measuring the small flare of a large numerical aperture optical system by a small hole scanning is presented. Using near-field optical fiber microstrip fiber optic probe sampling technology and piezoelectric ceramic scanning technology, optical system can be small light spot light intensity distribution of high-resolution measurements. This method is particularly suitable for the measurement of small spots in large numerical aperture optical systems because the size of the fiber probe sampling points is tens of nanometers or less and the piezoelectric ceramic scanning pitch is a few nanometers or less. Experiments show that using this method, the spatial resolution of measurement can reach about 50 ~ 10 0 nm.