三坐标测量机(CMM)是坐标测量技术中高效率的精密测量系统,随着超精密加工技术的发展,对三坐标测量机测量精度的要求越来越高。考虑到三坐标测量机在测量过程中的弱刚体性状态,提出了一种基于激光追踪仪多站位测量的三坐标测量机空域坐标修正方法。首先建立激光追踪仪多站位测量系统,然后利用激光追踪仪的高精度干涉测长值对被测空域内的三坐标测量机待测点坐标进行修正,最后利用三线性插值方法对三坐标测量机的被测空域坐标进行修正。仿真实验结果表明利用所提出的空域坐标修正方法得到的标准球直径标准差均值为0.098μm,小于三坐标测量机直接测量得到的标准差均值0.118μm,验证了所提出的方法可以有效提高三坐标测量机空域坐标精度。 Coordinate Measuring Machine (CMM) is a highly efficient and accurate measurement system of coordinate measuring technology. With the development of ultra-precision machining technology, CMM has higher and higher requirements on measuring accuracy. Considering the weak rigid body state of CMM in the process of measurement, a coordinate correction method of CMM in CMM based on laser trackers multi-station measurement was proposed. Firstly, the multi-station measuring system of laser tracker is established. Then, the coordinate of the measuring point of the coordinate measuring machine in the airspace is corrected by the long-distance interferometer measured by the laser tracker. Finally, the three-coordinate interpolation Machine airspace coordinates of the amendment. The simulation results show that the average standard deviation of the standard sphere diameter obtained by the proposed method of airspace coordinate correction is 0.098μm, which is less than the mean standard error of 0.118μm measured directly by the CMM. The proposed method can effectively improve the three coordinates Measuring machine airspace coordinate accuracy.