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通过对金属Ce蒸发行为的分析,确定了合适的蒸发温度,在此基础上开展了电磁感应蒸发装置的设计及蒸发技术研究。对金属Ce蒸发速率进行了测定,并采用膜厚法分析蒸气密度分布,称重法测量了蒸气密度。结果表明:2 000℃左右金属Ce蒸发速率约为99~135g/h,实测值略低于理论值;金属Ce原子蒸气密度分布近似为余弦函数高次幂分布,原子蒸气密度约为10~(11) atom/cm~3量级。采用电磁感应加热蒸镀金属Ce薄膜具有应用可行性。
Through the analysis of metal Ce evaporation behavior, the suitable evaporation temperature was determined. Based on this, the design of the electromagnetic induction evaporation device and the evaporation technology were studied. The evaporation rate of metal Ce was measured, and the vapor density distribution was analyzed by film thickness method. The vapor density was measured by weighing method. The results show that the evaporation rate of Ce around 2 000 ℃ is about 99 ~ 135g / h, the measured value is slightly lower than the theoretical value. The vapor density distribution of Ce atom is approximately the high power distribution of cosine function, and the atomic vapor density is about 10 ~ 11) atom / cm ~ 3 order of magnitude. The use of electromagnetic induction heating evaporation of metal Ce film has the feasibility of application.