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本文详细介绍了厚度为0.5～1.0mm的硅片进行电阻率精密测量的误差分析,讨论了电阻率精密测量时不确定度的计算方法。
This paper introduces in detail the error analysis of resistivity measurement of the silicon wafer with the thickness of 0.5 ~ 1.0mm, and discusses the calculation method of the uncertainty in the precision measurement of the resistivity.