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叙述在亚磷酸 -二甲酯真空抽气系统中采用气冷罗茨真空泵机组代替过去一般采用的多台 W型往复式真空泵并联组合 ,可以大大降低功率消耗、提高抽气效率及其节约维修费用。
Describes the use of air-cooled Roots vacuum pump units in the phosphorous acid-dimethyl ester vacuum pumping system instead of the conventional parallel combination of multiple W-type reciprocating vacuum pumps, which can greatly reduce power consumption, increase pumping efficiency and save maintenance costs .