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为了更好地进行大口径光学元件轮廓测量,以激光跟踪仪作为测量的工具,引入测量平差理论对测量数据进行处理,以提高光学元件毛坯制作、铣磨加工阶段的轮廓测量精度。首先,对拟合误差的公式进行了推导,得出影响拟合精度的因素;之后,对于大口径元件轮廓测量的具体检测模型提出了提高拟合精度的方法;最后,对于实际的2 m量级口径的Si C主镜进行了实际的测量与拟合,并从F数、拟合残差、结构函数等角度分析了平差结果。所提出的方法对于大口径元件的加工检测具有较好的指导意义。
In order to better measure the contour of large-diameter optical components, the laser tracker is used as a measuring tool, and the measurement adjustment theory is introduced to process the measurement data to improve the contour measurement precision of the optical element blank manufacturing and milling process. First of all, the formula of the fitting error is deduced to get the factors that affect the fitting accuracy. Then, the method of improving the fitting accuracy is proposed for the specific detection model of large aperture component profile measurement. Finally, for the actual 2 m Grade caliber Si C main mirror was measured and fitted. The results of the adjustment were analyzed from the aspects of F number, residuals of fitting, structure function and so on. The proposed method has a good guiding significance for the processing and inspection of large-caliber components.