The amorphous Ti-Ni-Hf thin films with the specific compositions were prepared from single Ti-Ni-Hf alloy target by adjusting processing parameters of direct current magnetron sputtering deposition.Prior to the crystallization,a glass transition occurred in the present Ti-Ni-Hf thin films.The annealed Ti-Ni-Hf thin films were characterized by the nano-crystalline.With the annealing temperature increasing,the grain size firstly increased and then decreased owing to the presence of (Ti,Hf)2Ni precipitate.Two endothermic and exothermic peaks corresponding to B19'(→←)B2 martensitic transformation in heating and cooling curves were observed for the Ti-Ni-Hf thin films with the lower annealing temperature and shorter annealing time,which was closely related to the inhomoge-neous composition.However,the Ti-Ni-Hf thin films annealed at higher annealing temperature and longer annealing time showed the single stage B19'(→←)B2 martensitic transformation.In addition,the martensitic transformation temperatures firstly increased and then decreased with the annealing temperatures rising.