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对比研究Al2O3-SiC复相陶瓷激光直接刻蚀和水射流辅助激光刻蚀的作用效果,并讨论水射流流速对刻槽形状和蚀除量的影响。研究结果表明,水射流辅助激光刻蚀的加工方法能够大大减少刻槽内熔渣的堆积,有效降低再铸层厚度,显著提高刻槽的加工质量。在一定范围内,水射流流速越大,刻槽的形状越来越接近于标准的“V”槽;水射流流速不断增大时,激光的能量损失越多,导致刻槽的蚀除量不断变小。
The effects of direct laser ablation and water jet-assisted laser etching on Al2O3-SiC composite ceramics were compared and the influence of water jet velocity on groove shape and erosion volume was discussed. The results show that waterjet-assisted laser etching can greatly reduce the accumulation of slag in the groove, reduce the thickness of recast layer and improve the processing quality of the groove significantly. Within a certain range, the larger the velocity of the water jet, the shape of the groove closer to the standard “V” groove; water jet flow rate increases, the more the energy loss of the laser, leading to the etching of the groove The amount of ever-smaller.