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本文报道GaAs/AlGaAs多量子阱长波长红外探测器材料的制备及其性能.这种材料由GaAs阱和AlGaAs势垒组成,除内n型掺杂,具有50个周期.利用分子束外延技术成功地生长出了大面积(2英寸)均匀(厚度△t_max/≤3%,组分△ x_max/x≤3.4%,掺杂浓度△nmax/n≤3%,椭圆缺陷≤300cm-2)的外延材料.分析了暗电流的成因,通过加厚势垒(Lb≥300)、控制掺杂(n≤1×10 ̄18cm ̄3)、精确设计子带结构,将暗电流降低了几个数量级,同时使电子的输运得到了改善.由此得到了高质量的多量子阶红外探测器材料.
This paper reports the preparation and properties of GaAs / AlGaAs multi-quantum well long wavelength infrared detectors. This material consists of a GaAs well and an AlGaAs barrier with 50 periods except n-type doping. A large area (2 inches) of uniform thickness (Δt_max / ≤3%, Δx_max / x≤3.4%, doping concentration △ nmax / n≤3%) was successfully grown by molecular beam epitaxy Defects ≤ 300cm-2) of the epitaxial material. The causes of the dark current are analyzed. By thickening the barrier (Lb≥300) and controlling the doping (n≤1 × 10 ~ 18cm ~ 3), the sub-band structure is precisely designed to reduce the dark current by several orders of magnitude, The transport of electrons has been improved. As a result, a high quality multi-quantum infrared detector material was obtained.