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本文介绍了厚膜热敏电阻的电特性、可靠性及其各种成功的应用。它由氧化物半导体、稀有金属(RuO_2)和玻璃组成。氧化物半导体的性能和RuO_2的晶粒尺寸以及玻璃的特性对电阻和热敏电阻常数影响很大。氧化物半导体的热膨胀系数要小于105×10~(-7)K~(-1)以避免刚烧结膜的开裂。控制上述因素就可得到电阻率为1 Ω·cm到10MΩ·cm,热敏电阻常数为100到4500K。玻璃包封的厚膜热敏电阻的稳定性相当好。对结晶玻璃包封的厚膜热敏电阻进行加速寿命试验,表明其飘移率小于0.02％/年。该厚膜热敏电阻可广泛地用作精确而稳定的温度传感器和厚膜混合电路的精密温度补偿元件。
This article describes the electrical properties of thick-film thermistors, reliability and its successful applications. It consists of oxide semiconductors, rare metal (RuO 2) and glass. The performance of oxide semiconductors and the grain size of RuO 2 as well as the characteristics of the glass have a great influence on the resistance and the thermistor constants. The thermal expansion coefficient of the oxide semiconductor is less than 105 × 10 -7 K -1 to avoid the cracking of the immediately sintered film. Controlling these factors yields a resistivity of 1 Ω · cm to 10 MΩ · cm and a thermistor constant of 100 to 4500 KΩ. The stability of glass-encapsulated thick-film thermistors is quite good. Accelerated life tests on crystalline glass encapsulated thick film thermistors showed a drift of less than 0.02% / year. This thick film thermistor is widely used as a precision temperature compensating element for accurate and stable temperature sensors and thick film hybrid circuits.