本文着重对金属油扩散泵加热方式的改革进行研究分析。 半个多世纪以来,油扩散泵一直以超群 的生命力不断发展和完善着自己,特别是近年来随着多学科的不断发展,油扩散泵应用。之广泛是出乎意外的,这不能不归结于它的独特优点。尽管如此,油扩散泵仍然存在诸如返油率大、耗能高和 This article focuses on the metal oil diffusion pump heating method of reform and analysis. For more than half a century, the oil diffusion pump has been constantly developing and perfecting itself with extraordinary vitality. Especially in recent years, with the continuous development of multi-disciplines, oil diffusion pump applications. The wide range is unexpected, which can not but be attributed to its unique advantages. In spite of this, oil diffusion pumps still have problems such as large oil return rate and high energy consumption