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提出了一种新的实时微振动激光干涉测量仪。通过采用复合光源和反馈系统 ,有效地消除了激光二极管 正弦相位调制 (LD SPM )干涉仪中由电流调制所带来的测量误差和外界干扰所带来的影响 ,实现了物体微振动的纳米精度实时测量
A new real-time micro-vibration laser interferometer is proposed. By adopting the compound light source and the feedback system, the influence of the measurement error caused by the current modulation in laser diode Sine Phase Modulation (LD SPM) interferometer and external disturbance is effectively eliminated, and the micro-vibration nano-precision Real-time measurement