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为了确保惯性器件制造质量，研制了一种误差最大变动范围小于1μm的计量器具，设计制造出了结构新颖的测量装置，通过计算和验证，合理确定测量范围和测量力，解决了高精度的小型传感器和位移传递精度高的检测技术问题，把在位检测技术提高到一个新的水平。
In order to ensure the manufacturing quality of the inertial device, a measuring instrument whose maximum error range is less than 1μm has been developed and a novel measuring device has been designed and manufactured. By calculating and verifying, the measuring range and measuring force are reasonably determined, and the high precision small size Sensors and displacement transfer precision detection technology, the in-position detection technology to a new level.