研究了ＡｒＦ准分子激光振荡放大系统，中心波长１９３ｎｍ。用一只闸流管作为开关元件，通过主充放电网络匹配，有效地解决了两台器件的放电抖动，振荡放大倍数达到约５０倍，系统单脉冲输出能量５０ｍＪ。光束发散角低于０．２０ｍｒａｄ。 ArF excimer laser oscillation amplification system was studied, the central wavelength of 193nm. Using a thyristor as the switching element, through the main charge-discharge network matching, effectively solve the two devices discharge jitter, oscillation magnification of about 50 times, the system single pulse output energy 50mJ. Beam divergence less than 0.20mrad.