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为了改进微机电系统中的传感器应用范围和特性参数,采用微纳光纤制作了环形谐振腔结构,设计的结构具有尺寸小、损耗低,品质因素高等优点。理论上分析了微纳光纤的光传输模式特性,通过电场的传数矩阵推导了谐振腔中的速度变化与光强变化间的关系,得到了加速度作用下微环谐振腔的谐振波长、周长、有效折射率的变化值间的函数关系。仿真结果分析表明:设计的微环波导电场波动明显,耦合效率较好;光谱强度和3 d B带宽变化较小,Q值达到10~4;在质量块每增加10 g时,输出光谱图约向右漂移3nm;加速度与谐振波长漂移量基本呈线性关系,可以通过谐振波长的漂移量来实现对加速度的测量。研究结果能够为全光网络和微机电系统提供实现多种功能的光波导器件。
In order to improve the sensor’s application range and characteristic parameters in MEMS, a ring resonator structure is fabricated by using micro-nano optical fiber. The designed structure has the advantages of small size, low loss and high quality factor. Theoretical analysis of the optical transmission mode characteristics of the micro-nano optical fiber, the relationship between the speed change and the light intensity change in the resonant cavity is deduced by the transfer matrix of the electric field, and the resonant wavelength, perimeter , As a function of the change in effective index of refraction. The simulation results show that the design of the micro-loop waveguide field fluctuations obvious coupling efficiency is good; spectral intensity and 3 d B bandwidth changes small Q value of 10 to 4; in the mass for each additional 10 g, the output spectrum of about To the right drift 3nm; acceleration and wavelength shift of the resonant wavelength is basically a linear relationship between the resonant wavelength drift can be achieved to measure the acceleration. The results provide optical waveguide devices that enable multiple functions for all-optical networks and MEMS.