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利用射频 /直流磁控溅射法制备了 316 L不锈钢 / Si O2 复合薄膜 ,并对其组织、相结构和力学性能进行了测试分析。结果表明 :直流磁控溅射 316 L不锈钢薄膜呈柱状晶结构 ,主要由 Fe- Cr和 - Fe相构成 ,在 Fe-Cr(110 )晶面出现明显择优取向 ;由于 Si O2 的掺合 ,使 316 L不锈钢 / Si O2 复合薄膜柱状晶变细小 ,出现明显的二次柱状晶 ,Fe- Cr的 (110 )晶面择优取向消失 ,而 Fe- Cr的 (2 11)晶面衍射峰强度明显增强 ,316不锈钢膜硬度明显高于 316 L块体 ,掺入 Si O2 的金属 /陶瓷复合薄膜耐磨性有显著的提高
A 316 L stainless steel / Si O2 composite film was prepared by RF / DC magnetron sputtering and its microstructure, phase structure and mechanical properties were tested and analyzed. The results show that the DC magnetron sputtering 316L stainless steel thin film has a columnar crystal structure, mainly composed of Fe-Cr and - Fe phases, and has obvious preferential orientation on the Fe-Cr (110) crystal plane. Due to the blending of Si O2 The columnar crystals of 316L stainless steel / Si O2 composite thin film become thin and obvious secondary columnar crystals appear, the preferred orientation of the (110) crystal plane of Fe-Cr disappears and the diffraction peak intensity of (2 11) crystal plane of Fe-Cr increases obviously , The hardness of 316 stainless steel film is significantly higher than that of 316 L block, and the wear resistance of metal / ceramic composite film doped with Si O2 is significantly improved