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亚表面损伤(SSD)的系统表征和准确检测是控制光学材料加工表层损伤的关键。将SSD的表征方法和检测技术相结合,综述了光学材料SSD检测评价方法的研究进展;分析了超精密加工产生的SSD结构和表征参量;针对SSD的几何表征参量,介绍了几种典型的损伤性检测技术及其技术特点和适用范围;重点介绍了几种满足超精密加工检测要求的无损伤检测技术,并分析了其技术优势和发展瓶颈;对比了国内外SSD的表征与检测技术水平,并对SSD检测技术的发展趋势进行了展望。
Systematic characterization and accurate detection of sub-surface damage (SSD) are the keys to control the damage of the optical material on the surface. In this paper, we summarize the research progress of the SSD evaluation method for optical materials by combining the characterization method and the detection technique of SSD. We also analyze the structure and characterization parameters of the SSD produced by ultra-precision machining. According to the geometrical characterization parameters of SSD, several typical damage This paper introduces several non-destructive testing techniques to meet the requirements of ultra-precision machining and analyzes its technical advantages and development bottlenecks. By comparing the characterization and testing technologies of domestic and foreign SSDs, The development trend of SSD detection technology is also prospected.