【摘 要】
：
细电子束由加速器通过电子枪发射电子,经电子透镜及偏转射向目标靶. 以SDS-3电子束曝光机为基础,完成了电子束Cockcroft-Walton加速器噪声抑制的最优状态实验. 系统为加速器
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细电子束由加速器通过电子枪发射电子,经电子透镜及偏转射向目标靶. 以SDS-3电子束曝光机为基础,完成了电子束Cockcroft-Walton加速器噪声抑制的最优状态实验. 系统为加速器调整电路提供一个正比于输入电压的电流. 补偿放大器是由一个主放大器和一个辅助放大器组成,辅助放大器消除了主放大器自身的失调漂移. 文中介绍了复合调整式Cockcroft-Walton加速器的总体设计方案,给出了实现加速器高稳定度的关键技术措施. 从加速器总输出中滤去噪声信号,获得稳定的输出电压,并使电子束曝光机刻蚀出的图形质量和线条分辨率都得到了提高.
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