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为了提高应力检测的灵敏度,提出了一种基于应力集中的新型压阻式微悬臂梁设计方法.首先,通过在硅基悬臂梁上加工出一些条缝结构作为应力集中区域,利用应力集中效应来提高应力检测的灵敏度,并在梁上沿硅的(100)面<110>晶向布置4个压阻元件组成惠斯通电桥来进行应力检测.其次,用有限元法分析了不同参数的孔缝结构对应力分布的影响.结果表明,与传统的无应力集中区域的微悬臂梁结构相比,可以有效提高应力检测的灵敏度.当参数优化后的微悬臂梁尺寸为500μm×180μm×10μm,缝结构尺寸为50μm×20μm时,应力检测的灵敏度可以提高2.68倍.
In order to improve the sensitivity of stress detection, a new piezoresistive micro-cantilever beam design method based on stress concentration is proposed.Firstly, some stress-concentration regions are fabricated on silicon-based cantilever beams, and stress concentration effects are used to enhance the sensitivity The sensitivity of the stress detection and four Piezoresistive elements arranged along the (100) plane of the silicon to form the Wheatstone bridge for stress testing.Secondly, the finite element method was used to analyze the pore structure of different parameters The results show that compared with the conventional microcantilever structure without stress concentration region, the sensitivity of stress detection can be effectively improved.When the parameters of the optimized microcantilever beam are 500μm × 180μm × 10μm, the joint size When it is 50 μm × 20 μm, the sensitivity of stress detection can be improved by 2.68 times.