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研究了曲面拟合法对特定抛物和双曲近柱面检测中波前像差的处理过程,结果表明,对振幅为0.1λ的中频正弦型面形,由曲面拟合法得到的结果与该正弦型面形之差的RMS值分别可以达到0.015λ(8.25nm)和0.013λ(7.15nm).通过分析拟合阶数对精度的影响,确认存在一个特殊的阶数no、它使曲面拟合法的精度达到最高;讨论了估计no值的方法,得到了和no真实值完全符合的估计值,表明这些方法是行之有效的.
The processing of wave front aberration in a particular parabolic and hyperbolic near-cylindrical surface detection by surface fitting method is studied. The results show that for the mid-frequency sine surface with an amplitude of 0.1λ, the result obtained by the surface fitting method is similar to the sinusoidal The RMS value of the surface shape difference can reach 0.015λ (8.25nm) and 0.013λ (7.15nm), respectively. By analyzing the influence of the fitting order on the accuracy, it is confirmed that there is a special order no, which makes the surface fitting method The accuracy is maximized; the method of estimating the no value is discussed, and the exact match of the no true value is obtained, which shows that these methods are effective.