绝缘体上硅(SOI)工艺应用于诸如军事和空间电子系统等专门场合,已有二十多年历史了。由于SOI具有良好的抗辐射性和高速特性,使它在这些领域具有独特的优点。但是,因为它的材料价格较高,所以它每功能单元的成本高于体硅。然而,已出现三种新型SOI工艺,这些新工艺能够促进微 Silicon-on-insulator (SOI) processes have been used for more than two decades in specialized applications such as military and space electronics systems. Because SOI has good radiation resistance and high speed characteristics, it has unique advantages in these areas. However, its cost per unit is higher than that of bulk silicon because of its high material cost. However, three new SOI processes have emerged that can promote micro-fabrication