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用Ａｒ＋束溅射沉积技术在ＨｇＣｄＴｅ表面实现了ＺｎＳ的低温沉积．用Ｘ射线光电子能借（ＸＰＳ）对上述ＺｎＳ薄膜以及热蒸发ＺｎＳ薄膜中的Ｚｎ、Ｓ元素的化学环境进行了对比实验研究．实验表明：离子束溅射沉积ＺｎＳ薄膜具有很好的组份均匀性，未探测到元素Ｚｎ、Ｓ的沉积．
The low temperature deposition of ZnS on the surface of HgCdTe was achieved by Ar + beam sputtering deposition. X-ray photoelectron energy (XPS) was used to compare the chemical environments of the Zn and S elements in the ZnS films and the thermally evaporated ZnS films. The experimental results show that ZnS thin films deposited by ion beam sputtering have good composition uniformity and no deposition of elemental Zn, S is detected.