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近年来，超硬材料C3N4、GaN蓝光二极管激光引起人们的极大兴趣。另一方面汽车排放的NO对环境的污染也令人关注．为此，人们对N2等离子体的产生及其参数的测量进行了大量的研究。其中特别着重对微波激励N2的气体辉光放电进行研究，因为这种辉光放电效率高，安全可靠，并将有助于
In recent years, superhard material C3N4, GaN blue light diode laser aroused great interest. On the other hand, car emissions of NO pollution of the environment is also cause for concern. For this reason, a great deal of research has been conducted on the generation of N2 plasma and the measurement of its parameters. Among them, special attention is paid to the study on gas glow discharge of microwave-excited N2 gas because of its high efficiency, safety and reliability and will help